본문바로가기
Business

Business

Discover EQCell's newest challenges
and achievements, delivered fastest to you.

The NPS System (New Plasma Source System) is a deposition equipment for Transparent Conductive Oxide (TCO),
designed for the production of high-efficiency Perovskite Solar Cells utilizing a high-density Plasma Beam.

New Plasma
Source System

Competitive Advantages

  • Point 01

    We provide optimal H/W design and process consulting through the know-how acquired from many years of R&D by our specialized engineers. (Possession of R&D Systems and Measuring Instruments.)

    Solar-Cell(NPS) Competitiveness Icon
  • Point 02

    We hold sales references with various Big Customers in the Solar Cell market, based on our excellent performance and productivity.

    Solar-Cell(NPS) Competitiveness Icon

New Plasma
Source

Low-temperature deposition equipment for large-area Perovskite Solar Cells, sized 2,400mm x 1,200mm.

  • New Plasma Source 이미지
  • New Plasma Source 이미지

Technology

Technology Particle Energy Productivity Process Temp Transmittance Surface
Roughness
Application
NPS 20~30 eV High <150 88.0%@150℃ Ra : 0.15nm Low Temp.
Process
Sputter ≤ 10eV Low >200 88.5%@200℃ Ra : 0.51nm High Temp.
Process

Advantages of
NPS Process

  • Advantages of NPS Process 이미지
    Advantages of NPS Process 이미지
Advantages of NPS Process 아이콘
NPS

New Plasma Source

  • Smooth Surface

    Super Smooth Surface Performance
    (Better Performance for Down Stream Process)

  • Low Temperature & Plasma Damage

    Prevent degradation of
    sub-layer by heat and plasma

  • High Productivity

    Continuous production through source
    material supply without vacuum break

    High yield by superior system stability & reliability

    Easy Preventive Maintenance

  • Excellent Film Quality

    High quality of electrical &
    optical properties than sputtering process